The Micro-resistivity scanning logging instrument has the characteristics of high well wall coverage, high resolution, and intuitive visualization, which can improve logging accuracy, especially in the identification of thin layers, and can make clear and accurate discrimination. To study the motion accuracy's reliability of push system of micro-resistivity scanning logging instrument, MATLAB and ADAMS software were applied, and based on the Monte Carlo method, motion simulation was conducted on the pole plate, the push arm, corresponding rod components and gaps of the push system, and the reliability analysis of motion accuracy was carried out. The results show that the displacement changes of the measurement points of the error model of the push system are more significant than those of velocity and acceleration, and the impact of displacement changes on reliability is greater than those of velocity and acceleration. The motion accuracy reliability calculated using MATLAB software is 0.983 0, and the motion accuracy reliability simulated using ADAMS software is 0.988 7. The reliability calculation results of the two methods are close, with an error of 0.57%.