低压高密度等离子体电极性能研究
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上海交通大学,上海交通大学,中国航天科工一院,上海交通大学

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O461.2

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Study on Emission Performance of Low Voltage and High Density Plasma Electrode
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Shanghai Jiao Tong University,,,

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    摘要:

    本文设计了一种玻璃管式封闭等离子体腔室,以高频开关电源为工作电源,高纯氩气(体积分数为99.999%)为工作气体,并结合汤森放电理论,推导了等离子体密度与电流之间的关系,结合实验结果对该理论进行了验证。并测试了不同压强,不同电极下的封闭式等离子体密度。实验结果表明在以纯金属热阴极材料钨为电极,工作电流为200mA,管内气压为0.5torr的条件下,可将封闭式等离子体密度提高至1.1×1013cm-3。对封闭式等离子体密度与电流、腔室内气体压强及腔室电极之间的关系进行了分析,探索得到了一种封闭腔体内获得接近电弧放电高密度等离子体的方法。

    Abstract:

    In this paper, a glass tube closed plasma chamber is designed. The high-frequency switching power supply is used as the working power source and the high purity argon gas (99.999%) is used as the working gas. The relationship between plasma density and current is deduced based on the theory of Townsend discharge, and the theory is validated by the experimental results, and tested the different pressure, different electrodes under the closed plasma density. The experimental results show that the closed plasma density can be increased to 1.1 × 1013cm-3 under the condition that the pure hot metal cathode material is used as the electrode, the working current is 200mA and the tube pressure is 0.5torr. The relationship between the density of the closed plasma and the current, the gas pressure in the chamber and the chamber electrode is analyzed, and a method of obtaining the high density plasma close to the arc discharge in the closed cavity is explored.

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李道儒,李炳辰,张生俊,等. 低压高密度等离子体电极性能研究[J]. 科学技术与工程, 2018, 18(2): .
Li Daoru,, and. Study on Emission Performance of Low Voltage and High Density Plasma Electrode[J]. Science Technology and Engineering,2018,18(2).

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历史
  • 收稿日期:2017-06-18
  • 最后修改日期:2018-01-11
  • 录用日期:2017-09-05
  • 在线发布日期: 2018-02-02
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