In micro electrical discharge machining (EDM), decreasing the material removal per single pulse discharge is important as a result of the material removal per single pulse discharge (discharge crater) mainly determines the minimum machinable size and surface roughness of the micro EDM. For this purpose, high resistance materials such as single-crystal silicon are used as tool electrodes. Analytical results show that the peak value of the discharge current are decreasing with the increase of electrode resistance, whereas the pulse duration increases. In addition, the influence of resistance value on the diameter of crater on workpiece surface was studied and tested when machining stainless steel workpiece using the silicon electrode. Experimental results reveal that the diameter of discharge craters decreases and achieves to with the increase silicon electrode resistivity, at the same time, the surface roughness of workpiece is reduced to , and the surface processing quality is improved.