The calculation formula of spring constant of the folded MEMS springs was derived by the Card's second law and Hooke's law. The results of ANSYS finite element simulation prove the relative error is less than 1%. On the basis of the calculation formula and the simulation,the law of various structural parameters on the impact of spring constant was researched. At last,the designed spring mass system were carried out modal analysis and harmonic analysis,and the analysis results consistent with the theory. The results for the analysis and design of other structures of MEMS springs provide some reference.
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吴鹏飞. 折叠式MEMS弹簧弹性系数研究与有限元分析[J]. 科学技术与工程, 2011, (28): . Wu Pengfei. Study on the Spring Constant of the Folded MEMS Springs and the Finite Element Analysis[J]. Science Technology and Engineering,2011,(28).